采用SU-8光刻胶为前驱体,控制转速在硅基上均匀旋涂SU-8胶薄膜,采用不同碳化温度制得微型微机电系统(MEMS)超级电容器多孔碳电极材料。研究结果表明:在碳化温度为900℃的条件下,制得的MEMS超级电容器多孔碳电极材料的孔隙结构发达、导电性较好,0.5mA/cm2电流密度下比电容可达49.3mF/cm2,在超级电容器电极材料领域具有较好的市场前景。
SU-8 photoresist was used as precursor,SU-8 film was spin coated over the silicon substrate at controlled speed,then it was prepared by different high temperature pyrolysis used as porous carbon electrode material for MEMS supercapacitor.The results showed that the porous structure of carbon electrode material was well developed and had good conductivity under the carbonization temperature of 900℃,and the specific capacitance was up to 49.3mF/cm2 at the current density of 0.5mA/cm2.In the field of supercapacitor electrode material had a good market prospects.
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基金资助
国家自然科学基金(61674113,51622507,61471255);山西省自然科学基金(2014011019-1,20141001021-2,2016011040);人社部留学基金([2014]240);山西省人社厅留学人员择优资助项目([2013]251);山西省高校科技创新研究项目(2016138)
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