Copper-doped nanostructured diamond-like carbon film (Cu-DLC) was prepared by a magnetron sputtering coating technique with a DC power supply under different substrate negative bias.The composition and phase structure of the film were characterized by EDS spectrum analyzer and X-ray diffraction analyzer (XRD).The tribological properties of the films were investigated by ball-disk rotary friction and wear tester.The morphology of the wear marks was analyzed by 3D ultra-depth microscope.The results shown that ①a series of Cu-DLC films were successfully prepared on 304 stainless steel.When there was no negative bias,the film had a low copper content and poor tribological properties.After adding a negative bias,the copper content of the films increased,However,as the negative bias increased,the amount of copper was gradually reduced.②The doping of Cu element can effectively reduce the friction coefficient of the films,and the prepared film had a lower friction coefficient (below 0.1)and achieved low friction.③The substrate negative bias significantly affected the element doping amount and film quality of the films,When the negative bias voltage was 100V,the film had the highest copper content,and the tribological properties of the films were the best.The friction coefficient was 0.0669 and the wear rate was the smallest of 9.87×10-5mm3/(N·m).
Wu Kunyao, Lian Feilong, Cao Fengxiang, Li Zhao
. Influence of substrate negative bias on tribological property of Cu-DLC film[J]. New Chemical Materials, 2020
, 48(10)
: 151
-154
.
DOI: 10.19817/j.cnki.issn 1006-3536.2020.10.033
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