Transparent conducting Al-doped zinc oxide and In-doped tin oxide films were deposited on glass substrates by magnetron sputtering.The high transmission spectrum and photoelectric properties of AZO and ITO films were compared.The figure of merit FTC of AZO(0.61×10-3Ω-1) was one order lower than ITO(2.23×10-3Ω-1)when the thickness was 200 nm.When the film thickness increased to around 390 nm,the FTC of AZO was 2.05×10-3Ω-1,and the ITO was 4.16×10-3Ω-1,the FTC of AZO was closed to the FTC of ITO.When its thickness wais 213nm,their thickness difference was only 183nm.Choosed the AZO film as the transparent conductive anode of the solar cell can reduce the cost when the thickness was allowed.This research was of great significance to the development of cheap solar cells.
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