A solid-state bonding method based on Cu Ni secondary sea cucumber like micro nano layer was proposed.The surfaces of the two substrates with a sea cucumber like Cu Ni micro-nano layer were contacted with each other to form a contact area,and then pressure was applied to the contact area under heating conditions to bond.The sea cucumber like Cu Ni micro-nano layer included a copper needle layer and a nickel needle layer plated on the surface of the copper needle layer.The copper needle layer was an array layer formed by a tapered copper microneedle,and the nickel needle layer included an array layer formed by a tapered nickel nanoneedle and a protuberance.The microstructure,bonding mechanism and shear strength of the interface were analyzed by scanning electron microscope,transmission electron microscope and welding strength testing instrument.The results shown that this solid state bonding method can obtain high strength interconnection force.
Xiao Jin, Zhai Qian, Zhang Bin, Chen Weiquan
. Solid state bonding method based on Cu-Ni secondary sea cucumber like micro-nano layer[J]. New Chemical Materials, 2021
, 49(7)
: 221
-224
.
DOI: 10.19817/j.cnki.issn 1006-3536.2021.07.049
[1] 黄圆.三维封装纳米Cu柱阵列基板电沉积制备方法及机理[D].哈尔滨:哈尔滨工业大学,2018.
[2] 李操.3D封装工艺及可靠性研究[D].武汉:华中科技大学,2015.
[3] 李科成,刘孝刚,陈明祥.用于三维封装的铜-铜低温键合技术进展[J].电子元件与材料,2015,34(1):9-14.
[4] 张昆.面向三维封装的铜互连技术研究[D].武汉:华中科技大学,2014.
[5] 陆裕东,何小琦,恩云飞.三维封装中引线键合技术的实现与可靠性[J].微电子学,2009,39(5):710-713.
[6] Takagi H,Kikuchi K,Maeda R,et al.Surface activated bonding of silicon wafers at room temperature[J].Applied Physics Letters,1996,68(16):2222-2224.
[7] Pan C,Yang H,Shen S,et al.A low-temperature wafer bonding technique using patternable materials[J].Journal of Micromechanics and Microengineering,2002,12(5):611-615.
[8] Wang P I,Lee S H,Parker T C,et al.Low temperature wafer bonding by copper nanorod array[J].Electrochemical and Solid-State Letters,2009,12(4):H138-H141.
[9] Hang T,Hu A,Ling H,et al.Super-hydrophobic nickel films with micro-nano hierarchical structure prepared by electrodeposition[J].Applied Surface Science,2010,256(8):2400-2404.
[10] Zhang W,Yu Z,Chen Z,et al.Preparation of super-hydrophobic Cu/Ni coating with micro-nano hierarchical structure[J].Materials Letters,2012,67(1):327-330.