Influence of substrate temperature on optical and electrical properties of magnetron co-sputtering TZO

He Shuangci, Zhong Zhicheng, Wei Yanfeng, Wang Jingyang, Zhang Xuming

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New Chemical Materials ›› 2019, Vol. 47 ›› Issue (1) : 108-111.

Influence of substrate temperature on optical and electrical properties of magnetron co-sputtering TZO

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2019, 47(1): 108-111

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