大尺寸和晶体结构完整的单层和多层石墨烯的高效制备方法对其工业化生产和大范围应用具有重要意义。化学气相沉积法(CVD)是合成高质量石墨烯薄膜的最有前途的方法。综述了通过常规CVD法或改良CVD法,如等离子体增强CVD法(PE-CVD),制备单层或多层石墨烯所用的固体(S)、液体(L)和气体(G)碳源的先进研究活动和最新进展。
The efficient preparation methods of single and multilayer graphene films with large size and complete crystal structure are of great significance for their industrial production and wide application.Chemical vapor deposition (CVD) is cited as the most promising method for the synthesis of high quality graphene films.Advanced research activities and latest development towards solid (S),liquid (L) and gaseous (G) carbon source used to synthesize monolayer or multilayer graphene by conventional CVD method and modified CVD method,such as plasma enhanced CVD method (PE-CVD),were reviewed.
[1]Geim A K,Novoselov K S.The rise of graphene[J].Nat Mater,2007,6(3):183-191.
[2]Allen M J,Tung V C,Kaner R B.Honeycomb carbon:a review of graphene[J].Chemical Reviews,2010,110(1):132-45.
[3]Orlita M,Faugeras C,Plochocka P,et al.Approaching the dirac point in high-mobility multilayer epitaxial graphene[J].Physical Review Letters,2008,101(26):973-980.
[4]Balandin A A,Ghosh S,Bao W,et al.Superior thermal conductivity of single-layer graphene[J].Nano Letters,2008,8(3):902-907.
[5]Lin Y,Li X,Xie D,et al.Graphene/semiconductor heterojunction solar cells with modulated antireflection and graphene work function[J].Energy & Environmental Science,2012,6(1):108-115.
[6]Moraes F C,Freitas R G,Pereira R,et al.Coupled electronic and morphologic changes in graphene oxide upon electrochemical reduction[J].Carbon,2015,91:11-19.
[7]Randviir E P,Brownson D A C,Banks C E.A decade of graphene research:production,applications and outlook[J].Materials Today,2014,17(9):426-432.
[8]Singh B R,Shoeb M,Khan W,et al.Synthesis of graphene/zirconium oxide nanocomposite photocatalyst for the removal of rhodamineB dye from aqueous environment[J].Journal of Alloys & Compounds,2015,651:598-607.
[9]Malhat E A,Zainud-Deen S H.Equivalent circuit with frequency-independent lumped elements for plasmonic graphene patch antenna using particle swarm optimization technique[J].Wireless Personal Communications,2015,85(4):1851-1867.
[10]Liu J,Hei L F,Song J H,et al.High-rate homoepitaxial growth of CVD single crystal diamond by dc arc plasma jet at blow-down (open cycle) mode[J].Diamond & Related Materials,2014,46(24):42-51.
[11]Wei G,Han N,Chao Y,et al.A ternary alloy substrate to synthesize monolayer graphene with liquid carbon precursor[J].Acs Nano,2017,11(2):1371-1379.
[12]Li Z,Wu P,Wang C,et al.Low-temperature growth of graphene by chemical vapor deposition using solid and liquid carbon sources[J].ACS Nano,2011,5(4):3385-3390.
[13]Levchenko I,Han Z J,Kumar S,et al.Large arrays and networks of carbon nanotubes:morphology control by process parameters[M]//Syntheses and Applications of Carbon Nanotubes and Their Composites.InTech,2013.
[14]Somani P R,Somani S P,Umeno M.Planer nano-graphenes from camphor by CVD[J].Chemical Physics Letters,2006,430(1):56-59.
[15]Choi J H,Li Z,Cui P,et al.Drastic reduction in the growth temperature of graphene on copper via enhanced London dispersion force[R].APS,2013.
[16]Zhang J,Li J,Wang Z,et al.Low-temperature growth of large-area heteroatom-doped graphene film[J].Chemistry of Materials,2014,26(7):2460-2466.
[17]Lee E,Lee H C,Jo S B,et al.Heterogeneous solid carbon source-assisted growth of high-quality graphene via CVD at low temperatures[J].Advanced Functional Materials,2015,26(4):562-568.
[18]Gan Xiaochu,Zhou Haibo,Zhu Bangjing,et al.A simple method to synthesize graphene at 633K by dechlorination of hexachlorobenzene on Cu foils[J].Carbon,2012,50:306-310.
[19]Xu J,Fu C,Sun H,et al.Large-area,high-quality monolayer graphene from polystyrene at atmospheric pressure[J].Nanotechnology,2017,28(15):155605.
[20]Sharma S,Kalita G,Hirano R,et al.Synthesis of graphene crystals from solid waste plastic by chemical vapor deposition[J].Carbon,2014,72(72):66-73.
[21]Ruan G,Sun Z,Peng Z,et al.Growth of graphene from food,insects,and waste[J].Acs Nano,2011,5(9):7601-7607.
[22]Wu H,Li Z,Ji D,et al.One-pot synthesis of nanostructured carbon materials from carbon dioxide via electrolysis in molten carbonate salts[J].Carbon,2016,106:208-217.
[23]Lee J K,Lee S,Kim Y I,et al.The seeded growth of graphene[J].Scientific Reports,2014,4(2):5682-5686.
[24]Sun H,Xu J,Wang C,et al.Synthesis of large-area monolayer and bilayer graphene using solid coronene by chemical vapor deposition[J].Carbon,2016,108:356-362.
[25]Wu M,Ma B,Pan T,et al.Silver-nanoparticle-colored cotton fabrics with tunable colors and durable antibacterial and self-healing superhydrophobic properties[J].Advanced Functional Materials,2016,26(4):569-576.
[26]Guermoune A,Chari T,Popescu F,et al.Chemical vapor deposition synthesis of graphene on copper with methanol,ethanol,and propanol precursors[J].Carbon,2011,49(13):4204-4210.
[27]Arco L G D,Zhang Y,Kumar A,et al.Synthesis,transfer,and devices of single- and few-layer graphene by chemical vapor deposition[J].IEEE Transactions on Nanotechnology,2009,8(2):135-138.
[28]Chen Z,Ren W,Liu B,et al.Bulk growth of mono-to few-layer graphene on nickel particles by chemical vapor deposition from methane[J].Carbon,2010,48(12):3543-3550.
[29]Li X,Magnuson C W,Venugopal A,et al.Graphene films with large domain size by a two-step chemical vapor deposition process[J].Nano Letters,2010,10(11):4328.
[30]Kim Y S,Lee J H,Kim Y D,et al.Methane as an effective hydrogen source for single-layer graphene synthesis on Cu foil by plasma enhanced chemical vapor deposition[J].Nanoscale,2012,5(3):1221-1226.
[31]Kidambi P R,Ducati C,Dlubak B,et al.The parameter space of graphene CVD on polycrystalline Cu[J].Journal of Physical Chemistry C,2012,116(42):22492-22501.
[32]Chan S H,Chen S H,Lin W T,et al.Low-temperature synthesis of graphene on Cu using plasma-assisted thermal chemical vapor deposition[J].Nanoscale Research Letters,2013,8(1):285-290.
[33]Qi J L,Zhang L X,Cao J,et al.Synthesis of graphene on a Ni film by radio-frequency plasma-enhanced chemical vapor deposition[J].Science Bulletin,2012,57(23):3040-3044.
[34]Das S,Drucker J.Nucleation and growth of single layer graphene on electrodeposited Cu by cold wall CVD[J].Nanotechnology,2017,28(10):105601-105611.
[35]Cazzanelli E,Caruso T,Castriota M,et al.Spectroscopic characterization of graphene films grown on Pt(111) surface by chemical vapor deposition of ethylene[J].Journal of Raman Spectroscopy,2013,44(10):1393-1397.
[36]Cheng Q,Tang J,Ma J,et al.Graphene and carbon nanotube composite electrodes for supercapacitors with ultra-high energy density[J].Physical Chemistry Chemical Physics Pccp,2011,13(39):17615-17624.
[37]Sagar R R,Zhang X,Xiong C.Growth of graphene on copper and nickel foils via chemical vapour deposition using ethylene[J].Materials Research Innovations,2015,18(S4):706-710.
[38]Mueller N S,Morfa A J,Abou-Ras D,et al.Growing graphene on polycrystalline copper foils by ultra-high vacuum chemical vapor deposition[J].Carbon,2014,78(18):347-355.
[39]Yun S W,Seo D H,Yeon D H,et al.Low temperature growth of complete monolayer graphene films on Ni-doped copper and gold catalysts by a self-limiting surface reaction[J].Carbon,2013,64(11):315-323.
[40]Li Z,Wu P,Wang C,et al.Low-temperature growth of graphene by chemical vapor deposition using solid and liquid carbon sources[J].Acs Nano,2011,5(4):3385-3390.
[41]Kidambi P R,Ducati C,Dlubak B,et al.The parameter space of graphene CVD on polycrystalline Cu[J].Journal of Physical Chemistry C,2012,116(42):22492-22501.
[42]Gadipelli S,Calizo I,Ford J,et al.A highly practical route for large-area,single layer graphene from liquid carbon sources such as benzene and methanol[J].Journal of Materials Chemistry,2011,21(40):16057-16065.
[43]Guermoune A,Chari T,Popescu F,et al.Chemical vapor deposition synthesis of graphene on copper with methanol,ethanol,and propanol precursors[J].Carbon,2011,49(13):4204-4210.
[44]Lisi N,Buonocore F,Dikonimos T,et al.Rapid and highly efficient growth of graphene on copper by chemical vapor deposition of ethanol[J].Thin Solid Films,2014,571:139-144.
[45]Srivastava A,Galande C,Ci L,et al.Novel liquid precursor-based facile synthesis of large-area continuous,single,and few-layer graphene films[J].Chemistry of Materials,2010,22(11):3457-3461.
[46]Wang W,Li T,Wang Y.Photovoltaic response of N-doped graphene-based photodetector[A].NEMS 2012:7th IEEE international conference on nano/micro engineered and molecular systems[C].IEEE,2012:23-26.
基金资助
国家自然科学基金资助(项目号21376049);东北石油大学研究生创新项目(YJSCX2016-017NEPU)