化工新型材料

化工新型材料 ›› 2025, Vol. 53 ›› Issue (12) : 91-95. DOI: 10.19817/j.cnki.issn1006-3536.2025.12.017

新材料与新技术

基于磁控溅射工艺的WO₃/Mo复合薄膜电致变色特性研究

作者信息 +

Study on the electrochromic characteristics of WO₃/Mo composite films based on magnetron sputtering process

Zhang Chenyu, Shi Fangxiao

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Received		Published
2024-12-25		2025-12-20
Issue Date	Revised Date
2025-12-17	2024-12-25

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摘要

使用磁控溅射技术制备了不同Mo掺杂量的WO₃/Mo复合薄膜,并组装成电致变色器件。使用X射线衍射仪和扫描电子显微镜对WO₃/Mo复合薄膜的微观结构与表面形貌进行分析。此外,使用紫外-可见光分度计对薄膜的透过率进行测试,根据公式计算电致变色玻璃的光学调制幅度,使用电化学工作站测试薄膜的循环稳定性。实验结果显示,WO₃/Mo复合薄膜在提升光学调制幅度、缩短响应时间,以及强化循环稳定性方面成效显著。

Abstract

WO₃/Mo composite films with varying Mo doping levels were fabricated using magnetron sputtering technology and assembled into electrochromic devices.The microstructure and surface morphology of WO₃/Mo composite films were analyzed using X-ray diffractometer and scanning electron microscope.In addition,the transmittance of the films was tested using a UV visible spectrophotometer,and the optical modulation amplitude of the electrochromic glass was calculated according to the formula.The cyclic stability of the films was tested using an electrochemical workstation.The experimental results showed that the optical modulation amplitude of WO₃/Mo composite films was significantly enhanced,the response time was obviously shortened,and the cycling stability was greatly improved.

关键词

电致变色 / 钼掺杂 / 氧化钨 / 磁控溅射

Key words

electrochromic / molybdenum doping / tungsten oxide / magnetron sputtering

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基于磁控溅射工艺的WO₃/Mo复合薄膜电致变色特性研究[J]. 化工新型材料, 2025, 53(12): 91-95 DOI:10.19817/j.cnki.issn1006-3536.2025.12.017

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