为探究金属钨在电磁屏蔽和射线防护领域的应用可行性,采用射频磁控溅射法,在高经密涤纶长丝织物表面沉积金属钨,探究钨薄膜的物化结构,并对表面沉积金属钨织物的电磁屏蔽性能进行了测试。结果表明:溅射功率增加,钨的结晶度、取向度提高,钨膜的连续性、均匀性改善;溅射压强在一定范围内增加时,钨薄膜的结晶度、均匀性提高,但增至一定程度时,钨膜的匀整性反而下降;随溅射时间增加,钨薄膜连续性和匀整性提高。经实验优化后,在60W、1.0Pa、60min溅射条件下附带导电布的钨/涤纶复合织物平均电磁屏蔽性能值高达94dB,体现较好的电磁屏蔽性能。
In order to explore the application feasibility of tungsten in electromagnetic shielding and radiation protection,tungsten metal was deposited on the surface of high density polyester filament fabric by RF magnetron sputtering,and the physical and chemical structure of tungsten film was explored.The electromagnetic shielding performance of tungsten metal fabric were tested.The results shown that with the increase of sputtering power,the crystallinity and orientation of tungsten increased,and improved the continuity and uniformity of tungsten film.With the increase of sputtering pressure within a certain range,the crystallinity and uniformity of tungsten film increased.But with the increase of sputtering pressure to a certain extent,the uniformity of tungsten film decreased.With the increase of sputtering time,the continuity and uniformity was improved.After experimental optimization,the average value of electromagnetic shielding performance of tungsten/polyester composite fabric with conductive cloth under 60W,1.0Pa and 60min sputtering conditions was up to 94 dB,which shown good electromagnetic shielding performance.
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