为研究等离子体引发化学气相沉积(PECVD)实验中距离和功率对基底材料以及生成的二氧化钛(TiO2)纳米颗粒形貌结构的影响,通过自主研发的常压PECVD(AP-PECVD)设备,以钛酸丁酯为钛源,在锡/碳(Sn/C)纳米纤维表面沉积大量的TiO2纳米颗粒。通过扫描电镜和透射电镜观察了Sn/C/TiO2纳米纤维的形貌结构,采用X射线衍射仪研究了Sn/C/TiO2纳米纤维的晶形结构。结果表明:自主研发的设备沉积了大量的纳米颗粒;通过对功率和距离参数变化后沉积的Sn/C/TiO2纳米纤维测试发现,当功率为100W、距离为7mm时,沉积上的纳米颗粒直径在10～30nm之间,纳米纤维形貌保持良好,纤维内部结构基本没有被破坏;沉积上的TiO2纳米颗粒为非晶结构。
In order to find the effects of distance and generated power on the basal material and titanium dioxide (TiO2) nanoparticles morphology structure in the plasma enhanced chemical vapor deposition (PECVD) experiment,large amount of TiO2 nanoparticles could be deposited on the surface of tin/carbon (Sn/C) nanofibers through the self-designed atmospheric pressure PECVD device while the titanium source was tetrisobutyl titanate.The morphology structure of Sn/C/TiO2 nanofiber was tested by scanning electron microscopy (SEM) and transmission electron microscope (TEM),the crystal structure of Sn/C/TiO2 nanofiber was tested by X-ray diffraction (XRD).The results shown that the self-designed AP-PECVD device successfully deposited a large amount of nanoparticles,through the testing of Sn/C/TiO2 nanofibers which the power parameters and distance changed during the deposition found that when the power was 100w,distance was 7mm,the diameter of nanoparticles were between 10～30nm,the morphology of nanofibers were all keep in well and the internal structure wereundamaged.Most of the TiO2 nanoparticles presented amorphous structure.
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