衬底温度对共溅射法制备TZO薄膜光电性能的影响
何双赐, 钟志成, 魏彦锋, 汪竞阳, 张旭明
Influence of substrate temperature on optical and electrical properties of magnetron co-sputtering TZO
He Shuangci, Zhong Zhicheng, Wei Yanfeng, Wang Jingyang, Zhang Xuming
化工新型材料
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2019, (1): 108
-111
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