聚焦离子束在二维多孔Si/Al2O3/SiC薄膜透射电镜截面微观结构表征中的应用
陶伟杰, 刘灿辉, 陶莹雪, 贺振华
Application of focused ion beam technique in the microstructure characterization of transmission electron microscope cross section of two-dimensional porous Si/Al2O3/SiC film
Tao Weijie, Liu Canhui, Tao Yingxue, He Zhenhua
化工新型材料
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2023, (2): 155
-158
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DOI: 10.19817/j.cnki.issn1006-3536.2023.02.031
