磁控溅射制备Ni亚微米管阵列及微结构研究

陈昶, 刘春海, 张伟

Preparation and microstructure of Ni submicron tube array by magnetron sputtering

Chen Chang, Liu Chunhai, Zhang Wei

化工新型材料 . 2022, (4): 128 -131 . DOI: 10.19817/j.cnki.issn1006-3536.2022.04.026