纳米晶ZnS薄膜具有带隙宽度大、光学透过率高、介电常数低、化学稳定性好等特点,在透明导电膜、铜铟镓硒(CIGS)薄膜太阳能电池、发光器件、功能玻璃等领域表现出巨大的应用潜力。综述了纳米晶ZnS薄膜常用的制备方法,如磁控溅射法、化学浴沉积法、真空蒸发法和化学气相沉积法,同时还介绍了纳米晶ZnS薄膜的掺杂改性研究及其在相关领域的应用进展。
Having the features of broad band gap,high optical transmittance,low dielectric constant and excellent chemical stability,nanocrystalline ZnS films possess great potential in transparent conductive films,CIGS solar cells,light-emitting devices and functional glass.The recent researches on the preparation of nanocrystalline ZnS films were presented,such as magnetron sputtering,chemical bath depositon,vacuum evaporation and chemical vapor deposition.At the same time,the doping and applications of ZnS films were also introduced.
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基金资助
安徽省科技重大专项(17030901085);安徽省重点科技攻关项目(1704a0902010和1704a0902014)
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