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摘要
通过非平衡磁控溅射技术,改变沉积工艺参数,在不锈钢及单晶硅基体上制备未掺杂、钨(W)掺杂以及钒(V)掺杂类金刚石(DLC)薄膜。采用拉曼光谱,纳米压痕法对薄膜结构和力学性能进行表征。在室温、250℃、500℃进行磨损实验,研究其不同温度范围的摩擦磨损性能。研究结果表明:适量掺杂W元素,可显著地提高W-DLC膜力学与摩擦性能,在W靶电流为0.6A条件下,W-DLC膜具有最优的综合性能,纳米硬度和弹性模量分别为11.11GPa和169.25GPa,其中在250℃条件下摩擦系数低至0.044,室温磨损率为1.27×10-7mm3/Nm,但W-DLC薄膜难以适应高温;适量掺杂V元素,可以显著提高V-DLC膜的纳米硬度和弹性模量,并能改善高温摩擦性能,在V靶功率为1.2kW条件下,V-DLC薄膜的纳米硬度和弹性模量分别为37.36GPa和379.89GPa,其中在500℃高温摩擦条件下,V-DLC薄膜的摩擦系数最低为0.35。
Abstract
Undoped,tungsten (W) doped and vanadium (V) doped diamond-like carbon (DLC) films were prepared on stainless steel and monocrystalline silicon substrates by unbalanced magnetron sputtering with varying deposition parameters.The structure and mechanical properties of films were characterized by raman spectroscopy and nanoindentation.Wear experiments were carried out at room temperature,250℃ and 500℃ to study the friction and wear properties of alloy in different temperature ranges.The results showed that the mechanical and friction properties of W-DLC film can be significantly improved by doping W element.W-DLC films had the best comprehensive properties at 0.6A target current.The nano-hardness and elastic modulus of W-DLC films were 11.11GPa and 169.25GPa,respectively.The friction coefficient was as low as 0.044 at 250℃ and the room temperature wear rate was 1.27×10-7mm3/Nm,but W-DLC film was difficult to adapt to high temperature.The nano-hardness and modulus of elasticity of V-DLC film can be improved significantly by doping V element.The nano-hardness and modulus of elasticity of V-DLC film were 37.36GPa and 379.89GPa respectively at 1.2kW of V target power.The friction coefficient of V-DLC film was the lowest to 0.35 at 500℃.
关键词
钨、钒掺杂
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DLC薄膜
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温度适应
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摩擦磨损
Key words
tungsten and vanadium doping
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DLC film
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temperature adaptation
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friction and wear
钨与钒掺杂类金刚石薄膜的温度适应摩擦磨损机制研究[J].
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基金资助
国家自然科学基金(51671153,51771037);材料腐蚀与防护四川省重点实验室开放基金资助(2016CL13)
