Based on the pyrolysis of ionic liquid precursor,the carbon films were prepared on Al2O3 substrate.The surface morphology,structure and tribological properties of carbon films prepared at different pyrolysis temperatures were compared,and the optimum pyrolysis temperature were investigated.The films were analyzed by X-ray diffraction analyzer (XRD),X-ray photoelectron spectroscopy (XPS) and scanning electron microscope (SEM).The results showed that the pyrolysis temperature had great influence on the composition and internal stress of film,and the composition and internal stress affected the surface morphology and tribological properties of films.The optimum pyrolysis temperature was about 1000℃.
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基金资助
国家自然科学基金(51205125,51275167);湖南省自然科学基金项目(2016JJ6037)