二维材料因性能优异而被广泛研究,但高质量二维材料的制备存在难度。化学气相沉积法制备的二维材料有着超高的结晶度,被认为是制备高质量二维材料最有潜力的一种方法。但是,化学气相沉积法制备的二维材料也存在诸多问题。基于此,对化学气相沉积法制备二维材料的研究进展进行综述,重点围绕衬底、生长温度、载气流速、系统压力等影响因素进行探讨,为化学气相沉积法制备更高质量的二维材料奠定基础,也为化学气相沉积法制备其他新型二维材料提供借鉴。
Two-dimensional(2D) materials are widely studied because of their excellent performances,but the preparation of high-quality 2D materials is difficult.2D materials prepared by chemical vapor deposition(CVD) have ultra-high crystallinity,and considered to be the most promising method for preparing high-quality 2D materials.However,the 2D materials prepared by CVD also have many problems.Based on this,the research progress on the preparation of 2D materials by CVD method was reviewed,focusing on the influencing factors such as substrates,growth temperature,carrier gas flow rate,system pressure and so on.This will lay the foundation for preparing higher-quality 2D materials by CVD method,and provided reference ideas for the preparation of other novel 2D materials by CVD.
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