Abstract: The chemical vapor deposition process of graphene was simulated by computational fluid dynamics software (CFD).Temperature field,pressure field,velocity distribution and deposition of graphene were studied under the different condition of furnace which were atmospheric pressure(101325Pa)and low pressure(83Pa),respectively.The results showed that the pressure distribution of synthesis furnace was not uniform under atmosphere,the gas flow was disorder,it was easy to cause the effect on the reaction.At the same time,because of the pressure of airflow disorder made the heating zone temperature distribution was not uniform,it was not conducive to the graphene surface deposition process.In contrast to low pressure condition,the temperature distribution inside the heating zone,methane gas flow rate and pressure were evenly,so as to ensure the whole reaction smoothly.
李阳, 王飞, 赵世龙. 化学气相沉积法制备石墨烯过程的数值模拟研究[J]. 化工新型材料, 2018, 46(12): 178-181.
Li Yang, Wang Fei, Zhao Shilong,. Numerical simulation of graphene in chemical vapor deposition process. New Chemical Materials, 2018, 46(12): 178-181.
[1] Martin-olmos C,Rasool H I,Weiller B H,et al.Graphene Mems:a FM probe performance improvement[J].ACS Nano,2013,7(5):4164-4170. [2] 毕瑞可,张杰,吴玉玲,等.化学气相沉积法制备单层石墨烯的优化[J].微纳电子技术,2017,54(3):181-187. [3] 常靖,岳红彦,张虹,等.三维石墨烯材料的制备及在超级电容器中的应用现状[J].化工新型材料,2016,44(2):9-11. [4] Yin J,Liao G,Zhu D,et al.Photocatalytic ozonation of oxalic acid by g-C3N4/ graphene composites under simulated solar irradiation[J].Journal of Photochemistry & Photobiology A Chemistry,2015,315:138-144. [5] 石传明,孟晓宇,杨礼徳,等.聚醚酰亚胺/氧化石墨烯复合材料的制备与性能[J].合成材料老化与应用,2016,45(1):24-27. [6] 李干.化学气相沉积法生长石墨烯的CFD模拟研究[D].合肥:中国科学技术大学,2015. [7] 韩林芷,赵占霞,马忠权.化学气相沉积法制备大尺寸单晶石墨烯的工艺参数研究[J].物理学报,2014,24(63):3-9. [8] 于海玲,朱嘉琦,曹文鑫,等.金属催化制备石墨烯的研究进展[J].物理学报,2013,62(2):12-19. [9] John D,Anderson Jr.计算流体力学入门[M].姚朝晖,周强译.北京:清华大学出版社,2002:39-42. [10] 魏德英,国术坤,赵永男.石墨烯的制备与应用研究进展[J].化工新型材料,2011,39(6):11-14. [11] Yao H B,Ge J,Wang C F,et al.A flexible and highly pressure-sensitive graphene-polyrethane sponge based on fractured microsturcture design[J].Adv Mater,2013,25(46):6692-6698.